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Simple multimask technique for fabrication of high-resolution polymer structures

Author(s):
Publication title:
Organic photonic materials and devices II : 24-26 January 2000, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3939
Pub. Year:
2000
Page(from):
50
Page(to):
60
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435569 [0819435562]
Language:
English
Call no.:
P63600/3939
Type:
Conference Proceedings

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