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Photoluminescence characteristics of GaAS/AlGaAs quantum dot arrays fabricated by dry and dry-wet etching

Author(s):
Wang,X. ( Institute of Semiconductors )
Song,A.
Liu,J.
Cheng,W.
Li,G.
Li,C.
Li,Y.
Yu,J.
3 more
Publication title:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3899
Pub. date:
1999
Page(from):
147
Page(to):
152
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435019 [0819435015]
Language:
English
Call no.:
P63600/3899
Type:
Conference Proceedings

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