Micromirror actuation with electrostatic force and plate bending

Micromirror actuation with electrostatic force and plate bending

Author(s):

Han,S. ( Korea Univ. )
Park,H.
Pak,J.

Publication title:

Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3899

Pub. Year:

1999

Page(from):

117

Page(to):

123

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435019 [0819435015]

Language:

English

Call no.:

P63600/3899

Type:

Conference Proceedings

Details

TDL ID:	ZA00020417
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Photonics and Applications : Photonic Technology into the 21st Century
Conf. info. (Number):	1999
Conf. info. (Venue):	Singapore
Conf. info. (Date):	1999.12.01-1999.12.03

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