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Comparative investigation of high-resolution transmission electron microscopy and Fourier transform infrared spectroscopy for GaN films on sapphire substrate

Author(s):
Li,K. ( Institute of Materials Research and Engineering )
Hou,Y.T.
Feng,Z.C.
Chua,S.J.
Li,M.F.
Lau,E.W.P.
Wee,A.T.S.
2 more
Publication title:
Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3899
Pub. Year:
1999
Page(from):
84
Page(to):
91
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435019 [0819435015]
Language:
English
Call no.:
P63600/3899
Type:
Conference Proceedings

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