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Progress in gray-tone lithography and replication techniques for different materials

Author(s):
Reimer,K. ( Fraunhofer Institute for Silicon Technology )
Engelke,R.
Hofmann,U.
Merz,P.
Platen,K.T.Kohlmann von
Wagner,B.
1 more
Publication title:
Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3879
Pub. Year:
1999
Page(from):
98
Page(to):
105
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434760 [0819434760]
Language:
English
Call no.:
P63600/3879
Type:
Conference Proceedings

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