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Design and fabrication of high-resolution reflective light valves with silicon backplanes

Author(s):
Calster,A.Van ( Univ.of Ghent(Belgium)and IMEC )  
Publication title:
Projection displays V : 26-28 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3634
Pub. Year:
1999
Page(from):
64
Page(to):
70
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431059 [0819431052]
Language:
English
Call no.:
P63600/3634
Type:
Conference Proceedings

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