Thin film deposition by pulsed laser ablation:the direct simulation Monte Carlo
- Author(s):
- Bykov,N.Y. ( Institute for High-Performance Computing and Databases )
- Lukianov,G.A.
- Publication title:
- XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3574
- Pub. Year:
- 1998
- Page(from):
- 750
- Page(to):
- 754
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430397 [0819430390]
- Language:
- English
- Call no.:
- P63600/3574
- Type:
- Conference Proceedings
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