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Thin film deposition by pulsed laser ablation:the direct simulation Monte Carlo

Author(s):
Publication title:
XII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3574
Pub. Year:
1998
Page(from):
750
Page(to):
754
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430397 [0819430390]
Language:
English
Call no.:
P63600/3574
Type:
Conference Proceedings

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