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Laser-driven plasma CVD of thin films

Author(s):
Konov,V.I. ( General Physics Institute )
Prokhorov,A.M.
Uglov,S.A.
Bolshakov,A.P.
Leontiev,I.A.
Dausinger,F.
Hugel,H.
Angstenberger,B.
Sepold,G.
Metev,S.
5 more
Publication title:
Lasers in Synthesis, Characterization, and Processing of Diamond
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3484
Pub. date:
1997
Page(from):
2
Page(to):
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429421 [0819429422]
Language:
English
Call no.:
P63600/3484
Type:
Conference Proceedings

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