Benzocyclobutene as planarization resin for charge-coupled devices

Benzocyclobutene as planarization resin for charge-coupled devices

Author(s):

Perettie,D.J. ( Dow Chemical Co. )
Radler,M.J.
Smith,J.L.

Publication title:

Solid State Sensor Arrays and CCD Cameras

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2654

Pub. Year:

1996

Page(from):

48

Page(to):

50

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420282 [081942028X]

Language:

English

Call no.:

P63600/2654

Type:

Conference Proceedings

Details

TDL ID:	ZA00018861
Series ID:	PA00000029
Conf. info. (Name):	IS&T/SPIE Electronic Imaging : Solid State Sensor Arrays and CCD Cameras
Conf. info. (Number):	1996
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1996.01.31-1996.02.02

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