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Nanocrystalline silicon carbide film growth using hot filament CVD

Author(s):
Yu, M. B.
Rusli
Yoon, S. F.
Cui, J.
Chew, K.
Ahn, J.
Zhang, Q.
2 more
Publication title:
Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
593
Pub. Year:
2000
Page(from):
517
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995017 [1558995013]
Language:
English
Call no.:
M23500/593
Type:
Conference Proceedings

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