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Selective W for coating and releasing MEMS devices

Author(s):
Mani, S. S.
Fleming, J. G.
Sniegowski, J. J.
Boer, M. P. de
Irwin, L. W.
Walraven, J. A.
Tanner, D. M.
LaVan, D. A.
3 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
605
Pub. date:
2000
Page(from):
135
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995130 [1558995137]
Language:
English
Call no.:
M23500/605
Type:
Conference Proceedings

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