Blank Cover Image

Friction measurement in MEMS using a new test structure

Author(s):
Publication title:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
605
Pub. date:
2000
Page(from):
129
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995130 [1558995137]
Language:
English
Call no.:
M23500/605
Type:
Conference Proceedings

Similar Items:

de Boer,M.P., Redmond,J.M., Michalske,T.A.

SPIE-The International Society for Optical Engineering

Boer, Maarten P. de, Michalske, Terry A.

MRS - Materials Research Society

Jungk, J. M., Crozier, B. T., Bandyopadhyay, A., Moody, N. R., Bahr, D. F.

MRS-Materials Research Society

Sullivan, J.P., Friedmann, T.A., Boer, M.P. de, Van, D.A. La, Hoflfelder, R.J., Ashby, C.I.H., Dugger, M.T., Mitchell, …

Materials Research Society

de Boer, M. P., Knapp, J. A., Mayer, T. M., Michalske, T. A.

SPIE - The International Society of Optical Engineering

Bahr, D.F., Merlino, J.C., Yip, C.M., Banerjee, P., Byopadhyay, A.

Materials Research Society

Bahr, D.F, Crozier, B.T., Richards, C.D., Richards, R.F.

Materials Research Society

Cense, B., Chen, T., Park, B.H., Pierce, M.C., de Boer, J.F.

SPIE-The International Society for Optical Engineering

Boer,M.P.de, Jensen,B.D., Bitsie,F.

SPIE - The International Society for Optical Engineering

Boer,M.P.de, Luck,D.L., Walraven,J.A., Redmond,J.M.

SPIE-The International Society for Optical Engineering

Boer, M. P. de, Clews, P. J., Smith, B. K., Michalske, T. A.

MRS - Materials Research Society

Jensen,B.D., Bitsie,F., Boer,M.P.de

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12