Investigation of the deposition and integration of hard coatings for moving MEMS applications
- Author(s):
- Publication title:
- Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 605
- Pub. Year:
- 2000
- Page(from):
- 123
- Pub. info.:
- Warrendale, Pa.: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995130 [1558995137]
- Language:
- English
- Call no.:
- M23500/605
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
2
Conference Proceedings
Fabrication and RF Properties of Titanium Carbide/Gold Coplanar Waveguides for RF MEMS Applications
Materials Research Society |
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |