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Two- and three-dimensional ultrananocrystalline diamond (UNCD) structures for a high resolution diamond-based MEMS technology

Author(s):
Auciello, O.
Krauss, A. R.
Gruen, D. M.
Meyer, E. M.
Busmann, H. G.
Tucek, J.
Sumant, A.
Jayatissa, A.
Moldovan, N.
Mancini, D. C.
Gardos, M. N.
6 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
605
Pub. Year:
2000
Page(from):
73
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995130 [1558995137]
Language:
English
Call no.:
M23500/605
Type:
Conference Proceedings

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