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Soluble Polysilanes in Photolithography

Author(s):
Miller, R. D.
Hofer, D.
Rabolt, J.
Sooriyakumaran, R.
Willson, C. G.
Fickes, G. N.
Guillet, J. E.
Moore, J.
3 more
Publication title:
Polymers for high technology : electronics and photonics
Title of ser.:
ACS symposium series
Ser. no.:
346
Pub. Year:
1987
Page(from):
170
Pub. info.:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841214064 [0841214069]
Language:
English
Call no.:
A05800/346
Type:
Conference Proceedings

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