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Electron-Beam Sensitivity of Cross-Linked Acrylate Resists

Author(s):
Publication title:
Polymers for high technology : electronics and photonics
Title of ser.:
ACS symposium series
Ser. no.:
346
Pub. Year:
1987
Page(from):
86
Pub. info.:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841214064 [0841214069]
Language:
English
Call no.:
A05800/346
Type:
Conference Proceedings

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