EFFECTS OF RAPID THERMAL ANNEALING ON W/Si1-xGex CONTACTS

EFFECTS OF RAPID THERMAL ANNEALING ON W/Si1-xGex CONTACTS

Author(s):

Aubry, V.

Publication title:

Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

320

Pub. Year:

1994

Page(from):

299

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992191 [1558992197]

Language:

English

Call no.:

M23500/320

Type:

Conference Proceedings

Details

TDL ID:	ZA00020321
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicides, germanides, and their interfaces
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.02

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