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CHEMICALLY ASSISTED ION-BEAM ETCHING OF SOL-GEL DERIVED PZT, PLZT AND LiTaO3 THIN FILMS FOR SILICON BASED DEVICE INTEGRATION

Author(s):
Publication title:
Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
310
Pub. Year:
1992
Page(from):
139
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992061 [1558992065]
Language:
English
Call no.:
M23500/310
Type:
Conference Proceedings

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