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Process Definition for Obtaining Ultrathin Silicon Oxides Using Full-Wafer Electrical and Optical Measurements

Author(s):
Oberhofer, A.
Chen, J.
Koh, K.
Schrader, M.
Shah, S.
Venables, R.
Young, C.
Xu, M.
Kuehn, R.
Maher, D.
Venables, D.
6 more
Publication title:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
567
Pub. Year:
1999
Page(from):
573
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994744 [1558994742]
Language:
English
Call no.:
M23500/567
Type:
Conference Proceedings

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