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Long-Range Order in Ultrathin SiO2 Grown on Ordered Si(100)

Author(s):
Hurst, Q. B.
Herbots, N.
Shaw, J. M.
Floyd, M. M.
Smith, D. J.
Culbertson, R. J.
Grams, M. P.
Bradley, J. D.
Zimmerman, P.
Atluri, V.
5 more
Publication title:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
567
Pub. Year:
1999
Page(from):
181
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994744 [1558994742]
Language:
English
Call no.:
M23500/567
Type:
Conference Proceedings

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