Plasma Chemistries for Etching of La0.41Ca0.59MnO3 and SmCo CMR Structures
- Author(s):
Wang, J. J. Jung, K. B. Childress, J. R. Pearton, S. J. Sharifi, F. Dahmen, K. H. Gillman, E. S. Cadieu, F. J. Rani, R. Qian, X. R. Chen, Li - Publication title:
- High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 517
- Pub. Year:
- 1998
- Page(from):
- 141
- Pub. info.:
- Warrendale, Penn: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994232 [1558994238]
- Language:
- English
- Call no.:
- M23500/517
- Type:
- Conference Proceedings
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