Inductively-Coupled Plasma Etching of NiFe and NiFeCo
- Author(s):
Jung, K. B. Childress, J. R. Pearton, S. J. Jenson, M. Hurst, A. T., Jr. Johnson, D. - Publication title:
- High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 517
- Pub. Year:
- 1998
- Page(from):
- 79
- Pub. info.:
- Warrendale, Penn: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994232 [1558994238]
- Language:
- English
- Call no.:
- M23500/517
- Type:
- Conference Proceedings
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