Hot-Wire CVD Poly-Silicon Films for Thin-Film Devices
- Author(s):
- Publication title:
- Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 507
- Pub. Year:
- 1999
- Page(from):
- 879
- Pub. info.:
- Warrendale: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994133 [1558994130]
- Language:
- English
- Call no.:
- M23500/507
- Type:
- Conference Proceedings
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