Blank Cover Image

Microcrystalline Silicon Growth: Deposition Rate Limiting Factors

Author(s):
Publication title:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
507
Pub. Year:
1999
Page(from):
505
Pub. info.:
Warrendale: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994133 [1558994130]
Language:
English
Call no.:
M23500/507
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings In Situ Study of the Optoelectronic Properties of Very Thin p-Type ｦﾌc-Si:H Films and the Potential Profile at the p-(ｦﾌc-Si:H)/i-(a-Si:H) Interface

Hamma, S., Cabarrocas, P. Roca i

MRS - Materials Research Society
7 Conference Proceedings ANNEALING OF DEFECTS DURING THE DEPOSITION OF AMORPHOUS SILICON

Hata, N., Cabarrocas, i Roca, P., Wyrsch, N., Wagner, S., Favre, M.

Materials Research Society
2 Conference Proceedings Microcrystalline Silicon TFTs For AMLCDs

French, I.D., Cabarrocas, P.Roca I, Deane, S.C., Wehrspohn, R.B., Powell, M.J.

Electrochemical Society
8 Conference Proceedings Effect of Dopants on the Dynamic of Powder Formation and the Properties of Polymorphous Silicon Thin Films

Kharchenko, A.V., Suendo, V., Daineka, D., Roca i Cabarrocas, P.

Trans Tech Publications
3 Conference Proceedings Plasma Deposition of Silicon Clusters: A Way to Produce Silicon Thin Films With Medium-Range Order?

Cabarrocas, P. Roca i

MRS - Materials Research Society
9 Conference Proceedings In-situ Observation of High Deposition Rate Hydrogenated Polymorphous Silicon Cell Degradation Through Variable Intensity Method Measurements

Erik V. Johnson, Ka-Hyun Kim, Pere Roca i Cabarrocas

Materials Research Society
4 Conference Proceedings The Meyer-Neldel Rule In Conductivity Of Microcrystalline Silicon

Ram, Sanjay K., Kumar, Satyendra, Cabarrocas, P. Roca i

Materials Research Society
10 Conference Proceedings Assignment of High Wave-Number Absorption and Raman Scattering Peaks in Microcrystalline Silicon

Erik V. Johnson, Laurent Kroely, Pere Roca i Cabarrocas

Materials Research Society
5 Conference Proceedings Helium Versus Hydrogen Dilution of Silane in the Deposition of Polymorphous Silicon Films: Effects on the Structure and the Transport Properties

Saadane, O., Lebib, S., Kharchenko, A. V., Suendo, V., Longeaud, C., Cabarrocas, P. Roca i

Materials Research Society
11 Conference Proceedings Deposition of Nanostructured Silicon Thin Films by Means of the Selective Contribution of Particles in PECVD

Costa, J., Roura, P., Cabarrocas, P. Roca i, Viera, G., Bertran, E.

MRS - Materials Research Society
6 Conference Proceedings DETAILED STUDY OF ION BOMBARDMENT IN RF GLOW DISCHARGE DEPOSITION SYSTEMS: THE ROLE OF HELIIUM DILUTION

Cabarrocas, Roca P.

Materials Research Society
12 Conference Proceedings High Rate Deposition Of Microcrystalline Silicon Solar Cells Using 13.56 Mhz Pecvd - Prerequisites And Limiting Factors

Roschek, Tobias, Repmann, Tobias, Kluth, Oliver, Muller, Joachim, Rech, Bernd, Wagner, Heribert

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12