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High Conductivity Gate Metallurgy for TFT/LCD's

Author(s):
Fryer, Peter M.
Colgan, E.
Galligan, E.
Graham, W.
Horton, R.
Jenkins, L.
John, R.
Kuo, Y.
Latzko, K.
Libsch, F.
Lien, A.
Nywening, R.
Polastre, R.
Rothwell, M. E.
Wilson, J.
Wisnieff, R.
Wright, S.
12 more
Publication title:
Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
507
Pub. Year:
1999
Page(from):
37
Pub. info.:
Warrendale: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994133 [1558994130]
Language:
English
Call no.:
M23500/507
Type:
Conference Proceedings

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