Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials
- Author(s):
Saito, S. Hamada, K. Eaglesham, D. J. Shiramizu, Y. Benton, J. L. Kitajima, H. Jacobson, S. D. C. Poate, J. M. - Publication title:
- Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 477
- Pub. Year:
- 1997
- Page(from):
- 81
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993815 [1558993819]
- Language:
- English
- Call no.:
- M23500/477
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials
MRS - Materials Research Society |
Electrochemical Society |
2
Conference Proceedings
ION IMPLANTED CALIBRATION STANDARDS FOR Si SURFACE CONTAMINATION DETECTION BY TXRF
MRS - Materials Research Society |
8
Conference Proceedings
Correlation of electrical, structural, and optical properties of erbium in silicon
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
10
Conference Proceedings
CORRELATION OF ELECTRICAL, STRUCTURAL, AND OPTICAL PROPERTIES OF ERBIUM IN SILICON
Materials Research Society |
Kluwer Academic Publishers |
Trans Tech Publications |
Electrochemical Society |
MRS - Materials Research Society |