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Helical Resonator Plasma Oxidation of Amorphous and Polycrystalline silicon for Flat Panel Displays

Author(s):
Publication title:
Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
424
Pub. Year:
1997
Page(from):
165
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993273 [1558993274]
Language:
English
Call no.:
M23500/424
Type:
Conference Proceedings

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