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Stress Induced during the Solid-Phase Crystallization of Amorphous Silicon Deposited by LPCVD

Author(s):
Mohammed-Brahim, T.
Kis-Sion, K.
Briand, D.
Sarret, M.
Lebihan, F.
Fortin, B.
1 more
Publication title:
Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
403
Pub. Year:
1996
Page(from):
513
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993068 [1558993061]
Language:
English
Call no.:
M23500/403
Type:
Conference Proceedings

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