IMPORTANCE OF THE PHOTOEFFECTS IN RAPID ISOTHERMAL PROCESSING (RIP)

IMPORTANCE OF THE PHOTOEFFECTS IN RAPID ISOTHERMAL PROCESSING (RIP)

Author(s):

Publication title:

Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

342

Pub. Year:

1994

Page(from):

437

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992429 [1558992421]

Language:

English

Call no.:

M23500/342

Type:

Conference Proceedings

Details

TDL ID:	ZA00020298
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal and integrated processing
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.04.04-1994.04.07

Similar Items:

1 Conference Proceedings ROLE OF PHOTOEFFECTS IN INTEGRATED RAPID ISOTHERMAL PROCESSING Singh, R., Sinha, S., Thakur, R. P. S., Hsu, N. J. Materials Research Society	7 Conference Proceedings Exploitation of Quantum Photoeffects in Reducing Microscopic Defects and Processing Cycle Time in Advanced Rapid Thermal Processing Vedagarbha, V., Singh, R., Ratakonda, D., Vedula, L., Rohatgi, A., Narayanan, S. MRS - Materials Research Society
2 Conference Proceedings ROLE OF IN-SITU RAPID ISOTHERMAL PROCESSING (RIP) IN THE METALLIZATION AND PASSIVATION OF INDIUM PHOSPHIDE DEVICES Singh, R., Thakur, R. P. S., katz, A., Nelson, A. J. Materials Research Society	8 Conference Proceedings High-Performance High-Dielectric-Constant Films Deposited by Dual Spectral Source Rapid Isothermal-Assisted Metalorganic Chemical Vapor Deposition (MOCVD) Chen, Y., Singh, R., DeBoer, S., Thakur, R. P. S. MRS - Materials Research Society
3 Conference Proceedings DEPOSITION OF OXIDE BASED ADVANCED ELECTRONIC AND OPTICAL MATERIALS BY RAPID ISOTHERMAL PROCESSING (RIP) ASSISTED METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) Mavoori, J., Singh, R., Sharangpani, R., Gong, C., Poole, K. F., Singh, R. K., Natarajan, R. MRS - Materials Research Society	9 Conference Proceedings Rapid Photothermal Processing of High Dielectric Constant Materials Singh, R., Chen, Y., DeBoer, S., Thakur, R.P.S. Electrochemical Society
4 Conference Proceedings How Rapid Isothermal processing Can Be a Dominant Semiconductor Processing Technology in the 21st Century Singh, R., Sharangpani, R., Cherukuri, K. C., Chen, Y., Dawson, D. W., Poole, K. F., Rohatgi, A., Narayanan, S., Thakur, … MRS - Materials Research Society	10 Conference Proceedings ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING Nagabushnam, V., Singh, R. K., Thakur, R. P. S. MRS - Materials Research Society
5 Conference Proceedings X-RAY DOUBLE CRYSTAL ANALYSIS OF STRUCTURE AND STRESS RELAXATION IN SOLID PHASE EPITAXIAL CaF2 AND Ge/CaF2 FILMS ON (111) Si BY IN SITU RAPID ISOTHERMAL … Chaudhuri, J., Hashmi, F., Singh, R., Thakur, R. P. S. Materials Research Society	11 Conference Proceedings RECRYSTALLIZATION OF AMORPHOUS SILICON USING RAPID THERMAL PROCESSING LASER ANNEALING AND FURNACE HEATING Viatella, J., Singh, R. K., Thakur, R. P. S., Sandhu, G., Harkness, S. D. MRS - Materials Research Society
6 Conference Proceedings DEVELOPMENT TRENDS IN THE DIRECTION OF RAPID ISOTHERMAL PROCESSING (RIP) DOMINATED SILICON INTEGRATED CIRCUIT FABRICATION Singh, R., Nulman, J. Materials Research Society	12 Conference Proceedings Thin Nitride Films: Pushing the Limits Using Rapid Thermal Processing DeBoer, S. J., Thakur, R. P. S. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12