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BOROPHOSPHOSILICATE GLASS (BPSG) FUSION USING RAPID THERMAL ANNEALING AND STEAM REFLOW: PHYSICAL PROPERTIES AND DEVICE IMPLICATIONS

Author(s):
Maxim, M.
Moinpour, M.
Chu, J.
Nguyen, H.
Freiberger, P.
Stenton, N.
1 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
289
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

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