RAPID THERMAL OXIDATION FOR PASSIVATION OF POROUS SILICON

RAPID THERMAL OXIDATION FOR PASSIVATION OF POROUS SILICON

Author(s):

Publication title:

Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

342

Pub. Year:

1994

Page(from):

91

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992429 [1558992421]

Language:

English

Call no.:

M23500/342

Type:

Conference Proceedings

Details

TDL ID:	ZA00020298
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal and integrated processing
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.04.04-1994.04.07

Similar Items:

1 Conference Proceedings LIGHT EMISSION VERSUS EXCITATION FROM POROUS STRUCTURES IN ION-IMPLANTED SILICON Vazsonyi, E., Barsony, I., Lohner, T., Fried, M., Erostyak, J., Racz, M., Paszti, F. MRS - Materials Research Society	7 Conference Proceedings X-RAY DIFFRACTION ANALYSIS OF DAMAGE AND DOPING EFFECTS IN LOW-DOSE, HIGH-ENERGY IMPLANTED SILICON Klappe, Jos G. E., Barsony, Istvan, Ryan, Tom W. Materials Research Society
2 Conference Proceedings RAPID THERMAL ANNEALING OF LOW-ENERGY P AND B IMPLANTS IN SILICON, OPTIMIZED BY HIGH RESOLUTION X-RAY DIFFRACTION Klappe, J. G. E., Barsony, I., Woerlee, P. H., Ryan, T. W., Alkemade, P. MRS - Materials Research Society	8 Conference Proceedings Modular PC-Controlled Polarimetric Ellipsometer with Variable Angle of Incidence and Spectral Options Mosoni,T., Petrik,P., Fried,M., Barsony,I. SPIE-The International Society for Optical Engineering
3 Conference Proceedings PC-Controlled CCD-Matrix-based Optical Multichannel Analyzer for RESPECT Measurements Forizs,Sz., Horrvath,Z.G., Lohner,T., Fried,M., Barsony,I. SPIE-The International Society for Optical Engineering	9 Conference Proceedings ANALYSIS OF HIGH-DOSE IMPLANTED SILICON BY HIGH-DEPTH RESOLUTION RBS AND SPECTROSCOPIC ELLIPSOMETRY AND TEM Lohner, T., Mezey, G., Fried, M., Ghita, L., Ghita, C., Mertens, A., Kerkow, H., Kotai, E., Paszti, F., Banyai, F., … Materials Research Society
4 Conference Proceedings Concept of a Neural System for Real-Time Evaluation of Spectroscopic Measurements Redei,L., Fried,M., Lohner,T., Polgar,O., Barsony,I., Forizs,Sz., Horvath,Z.G., Humlicek,J., Wallinga,H. SPIE-The International Society for Optical Engineering	10 Conference Proceedings An XPS study of silicon oxynitride rapid thermally grown in nitric oxide Lai, W. H., Li, M. F., Pan, J. S., Liu, R., Chan, L., Chua, T. C. MRS-Materials Research Society
5 Conference Proceedings LIGHT EMISSION FROM POROUS SILICON SUBJECTED TO RAPID THERMAL OXIDATION Cullis, A.G., Canham, L.T., Williams, G.M., Smith, P.W., Dosser, O.D. Materials Research Society	11 Conference Proceedings CHARACTERIZATION OF STRESS AND TEXTURE IN RTCVD POLY-Si LAYERS BY X-RAY DIFFRACTION Barsony, Istvan, Klappe, Joe G. E., Ryan, Tom W. Materials Research Society
6 Conference Proceedings EFFECT OF RAPID THERMAL OXIDATION ON BLUE AND RED LUMINESCENCE BANDS OF POROUS SILICON Sen, S., Kontkiewicz, A. J., Kontkiewicz, A. M., Nowak. G., Siejka, J., Sakthivel, P., Ahmed, K., Mukherjee, P., … MRS - Materials Research Society	12 Conference Proceedings ION IMPLANTATION DEFECT CHARACTERIZATION BY HIGH-RESOLUTION X-RAY DIFFRACTION Klappe, Jos G. E., Barsony, Istvan, Ryan, Tom W. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12