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INFLUENCE OF H2 ON Ge SURFACE SEGREGATION IN Si/SiGe HETEROSTRUCTURES GROWN BY RTP/VLP-CVD

Author(s):
Zhang, R.
Huang, H.
Gu, S.
Yang, K.
Shi, Y.
Wang, R.
Zheng, Y.
Feng, D.
3 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
63
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

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