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THE GROWTH AND IN-SITU DOPING OF SiGe/Si STRAINED HETEROSTRUCTURES BY RTP/VLP-CVD

Author(s):
Gu, S.
Zheng, Y.
Zhang, R.
Wang, R.
Han, P.
Huang, X.
Zhong, P.
Hu, L.
Zhu, S.
Chen, J. N.
5 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. date:
1994
Page(from):
57
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

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