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IN-SITU DOPED MULTI-LAYER EPITAXIAL STRUCTURES WITH ABRUPT DOPING TRANSITIONS BY ULTRA HIGH VACUUM RAPID THERMAL CHEMICAL VAPOR DEPOSITION (UHV-RTCVD)

Author(s):
Ozturk, M. C.
Celik, S. M.
Ban, I.
Harris, G.
Sanganeria, M. K.
Violette, K. E.
Lee, A.
2 more
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
43
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

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