Blank Cover Image

DEPOSITION OF MONOLAYER-SCALE GERMANIUM/SILICON HETEROSTRUCTURES BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Author(s):
Publication title:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
342
Pub. Year:
1994
Page(from):
31
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992429 [1558992421]
Language:
English
Call no.:
M23500/342
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Defect-Free Band-Edge Photoluminescence in SiGeC Strained Layers Grown by Rapid Thermal Chemical Vapor Deposition

Liu, C. W., Amour, A. St., Sturm, J. C., Lacroix, Y. R. J., Thewalt, M. L. W.

MRS - Materials Research Society
7 Conference Proceedings GROWTH AND PHOTOLUMINESCENCE OF STRAINED <110> Si/Si1-xGex/Si QUANTUM WELLS GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Liu, C. W., Sturm, J. C., Lacroix, Y. R. J., Thewalt, M. L. W., Perovic, D. D.

MRS - Materials Research Society
2 Conference Proceedings *RAPID THERMAL CHEMICAL VAPOR DEPOSITION OF GERMANIUM AND GERMANIUM/SILICON ALLOYS ON SILICON: NEW APPLICATIONS IN THE FABRICATION OF MOS TRANSISTORS

Ozturk, M. C., Grider, D. T., Ashburn, S. P., Sanganeria, M., Wortman, J. J.

Materials Research Society
8 Conference Proceedings SILICON CARBIDE STRUCTURES PREPARED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Crowley, J. L., Liao, J. C., Kleins, P. H., Campisi, G. J.

Materials Research Society
3 Conference Proceedings Luminescence in Si/Strained Si1-xGex Heterostructures

Sturm, J. C., Amour, A. St., Lacroix, Y., Thewalt, M. L. W.

MRS - Materials Research Society
9 Conference Proceedings *LUMINESCENCE PROCESSES IN Si1-XGeX/Si HETEROSTRUCTURES GROWN BY CHEMICAL VAPOR DEPOSITION

Sturm, J.C., Xiao, X., Mi, Q., Lenchyshyn, L.C., Thewalt, M.L.W.

Materials Research Society
4 Conference Proceedings The Growth of β-SiC on Si and Poly-Si on β-SiC Rapid Thermal Chemical Vapor Deposition

Liu, C. W., Sturm, J. C.

MRS - Materials Research Society
10 Conference Proceedings Chemical Vapor Deposition Epitaxy of Silicon-based Materials using Neopentasilane

J.C. Sturm, K.H. Chung

Electrochemical Society
5 Conference Proceedings Novel Applications of Rapid Thermal Chemical Vapor Deposition for Nanoscale MOSFET's

Sturm, J. C., Yang, M., Chang, C. L., Carroll, M. S.

MRS - Materials Research Society
11 Conference Proceedings Selective Deposition of Silicon and Silicon-Germanium Alloys by Rapid Thermal Chemical Vapor Deposition

Grant, John M., Ang, Ming, Allen, Lynn R.

MRS - Materials Research Society
6 Conference Proceedings Rapid Thermal Chemical Vapor Deposition of Polycrystalline Silicon-Germanium Films on SiO2 and Their Properties

Li, V. Z-Q, Mirabedini, M. R., Kuehn, R. T., Gladden, D., Batchelor, D., Christenson, K., Wortman, J. J., Ozturk, M. C., …

MRS - Materials Research Society
12 Conference Proceedings WELL-RESOLVED BAND-EDGE PHOTOLUMINESCENCE FROM STRAINED Si1-xGex LAYERS GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Sturm, J.C., Schwartz, P.V., Manoharan, H., Mi, Q., Lenchyshyn, L.C., Thewalt, M.L.W., Rowell. N.L., Noel, J.-P., …

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12