Dependence of optical constants of AZ BARLi bottom coating on bake conditions
- Author(s):
- Dammel,R.R. ( Hoechst Celanese Corp. )
- Sagan,J.P.
- Synowicki,R.A.
- Publication title:
- Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3049
- Pub. Year:
- 1997
- Page(from):
- 963
- Page(to):
- 973
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424631 [0819424633]
- Language:
- English
- Call no.:
- P63600/3049
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
"Toward 0.1-μm contacd hole process by using water soluble organic overcoating material (WASOOM)―Resist flow technology ?: study on WASOOM, top flare, and …
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Optimizing image transfer into AZ BARLi bottom coat for submicron i-line lithography
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Refractive indices in thick photoresist films as a function of bake conditions and film exposure
SPIE-The International Society for Optical Engineering |