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Novel polymeric dyes for bottom antireflective coatings

Author(s):
Ding,S. ( Hoechst Celanese Corp. )
Lu,P.-H.
Dammel,R.R.
Shan,J.
Mehtsun,S.
Hannigan,T.T.
Eberly,D.E.
Khanna,D.N.
Tanaka,H.
4 more
Publication title:
Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3049
Pub. Year:
1997
Page(from):
765
Page(to):
774
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424631 [0819424633]
Language:
English
Call no.:
P63600/3049
Type:
Conference Proceedings

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