Structure and property relationships of fractionated novolac resins
- Author(s):
- Chen,K.-J.R. ( IBM Microelectronics Div. )
- Kwong,R.W.
- Jordhamo,G.
- Allen,R.D.
- Gallagher-Wetmore,P.M.
- Publication title:
- Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3049
- Pub. Year:
- 1997
- Page(from):
- 596
- Page(to):
- 607
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424631 [0819424633]
- Language:
- English
- Call no.:
- P63600/3049
- Type:
- Conference Proceedings
Similar Items:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Selectively esterified novolac resins:a study of resist properties as a function of novolac molecular weight and composition
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
"IBM 193-nm bilayer resist: materials, lithographic performance, and optimization"
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Supercritical fluid processing: a new dry technique for photoresist developing
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Block and random copolymer resists designed for 193-nm lithography and environmentally friendly supercritical CO2 development
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Supercritical fluid processing:opportunities for new resist materials and processes
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Novel combination of photoactive species:photoresists formed from selectively esterified novolacs and polyfunctional photoactive compounds
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Effect of molecular weight distribution on the dissolution properties of novolac blends
Society of Photo-optical Instrumentation Engineers |