Structure and property relationships of fractionated novolac resins

Author(s):

• Chen,K.-J.R. ( IBM Microelectronics Div. )
• Kwong,R.W.
• Jordhamo,G.
• Allen,R.D.
• Gallagher-Wetmore,P.M.

Publication title:

Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3049

Pub. date:

1997

Page(from):

596

Page(to):

607

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424631 [0819424633]

Language:

English

Call no.:

P63600/3049

Type:

Conference Proceedings