Microfabricated biaxial electrostatic torsional scanning mirror
- Author(s):
- Dickensheets,D.L. ( Stanford Univ. )
- Kino,G.S.
- Publication title:
- Micromachining and Imaging
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3009
- Pub. Year:
- 1997
- Page(from):
- 141
- Page(to):
- 150
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424204 [081942420X]
- Language:
- English
- Call no.:
- P63600/3009
- Type:
- Conference Proceedings
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