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Modeling of a filamental discharge formation and development in ArF excimer laser

Author(s):
Publication title:
Modeling and Simulation of Higher-Power Laser Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2989
Pub. Year:
1997
Page(from):
172
Page(to):
182
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424006 [0819424005]
Language:
English
Call no.:
P63600/2989
Type:
Conference Proceedings

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