100-kV electron gun for the x-ray mask writer EB-X2

100-kV electron gun for the x-ray mask writer EB-X2

Author(s):

Saito,K. ( NTT LSI Labs. )
Kato,J.
Shimazu,N.
Shimizu,A.

Publication title:

Charged-particle optics II : 5 August, 1996, Denver, Colorado

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2858

Pub. Year:

1996

Page(from):

2

Page(to):

12

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422460 [0819422460]

Language:

English

Call no.:

P63600/2858

Type:

Conference Proceedings

Details

TDL ID:	ZA00020276
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Charged-particle optics
Conf. info. (Number):	1996 : 2nd
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	1996.08.05

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