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Fabrication of 0.15 ヲフm SOIp-MOSFETs using Synchrotron Radiation X-ray Lithography,

Author(s):
Choi,S.S.
Jeon,Y.J.
Lyu,J.-S.
Yoo,H.J.
Fabrizio,E.D.
Grella,L.
Gentili,M.
2 more
Publication title:
Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2778
Pub. date:
1996
Vol.:
Part1
Page(from):
15
Page(to):
16
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421647 [0819421642]
Language:
English
Call no.:
P63600/2778
Type:
Conference Proceedings

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