Catadioptric Systems for Sub-Quarter Micron Lithography,
- Author(s):
- Publication title:
- Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2778
- Pub. Year:
- 1996
- Vol.:
- Part1
- Page(from):
- 11
- Page(to):
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421647 [0819421642]
- Language:
- English
- Call no.:
- P63600/2778
- Type:
- Conference Proceedings
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