Blank Cover Image

Improved method for the automated determination of E0 for lithography SPC

Author(s):
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. date:
1996
Vol.:
Part2
Page(from):
847
Page(to):
858
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

Similar Items:

Mason,M.E., Soper,R.A., Terry,R.M., Mack,C.A.

SPIE-The International Society for Optical Engineering

Garza, C.M., Bierschenk, T.

SPIE - The International Society of Optical Engineering

Mason,M.E., Soper,R.A.

SPIE-The International Society for Optical Engineering

Garza, C.M., Conley, W.E.

SPIE - The International Society of Optical Engineering

Jessen, S, Terry, M., Mason, M., O’Brien, S., Soper, R., Yarbrough, W., Wolf, T.

SPIE - The International Society of Optical Engineering

Cotell, C.M., Panish, M.B., Hamm, R.A., Hopkins, L.C., Gibson, J.M.

Materials Research Society

J.L. Sturtevant, M. Chaara, R. Elliot, L.D. Hollifield, R.A. Soper

Society of Photo-optical Instrumentation Engineers

Mason, M., Best, S., Zhang, G., Terry, M., Soper, R.

SPIE - The International Society of Optical Engineering

Garza,C.M., Conley,W., Roman,B.J., Schippers,M., Foster,J., Baselmans,J., Cummings,K.D., Flagello,D.G.

SPIE-The International Society for Optical Engineering

11 Conference Proceedings Rules based process window OPC

S. O'Brien, R. Soper, S. Best, M. Mason

Society of Photo-optical Instrumentation Engineers

W.L. Krisa, C.M. Garza, J.A. McKee

Society of Photo-optical Instrumentation Engineers

J.G. Garofalo, O.W. Otto, R.A. Cirelli, R.L. Kostelak, S. Vaidya

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12