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Micrascan III:0.25-ｦﾌm resolution step-and-scan system

Author(s):
Williamson,D.M. ( Silicon Valley Group Lithography Systems,Inc. )
McClay,J.A.
Andresen,K.W.
Gallatin,G.M.
Himel,M.D.
Ivaldi,J.
Mason,C.
McCullough,A.W.
Otis,C.
Shamaly,J.J.
Tomczyk,C.
6 more
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. date:
1996
Vol.:
Part2
Page(from):
780
Page(to):
786
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

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