Blank Cover Image

Fast and accurate optical proximity correction based on aerial image simulation

Author(s):
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. date:
1996
Vol.:
Part2
Page(from):
640
Page(to):
650
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

Similar Items:

Kamon,K., Hanawa,T., Moriizumi,K.

SPIE-The International Society for Optical Engineering

Keck, M.C., Henkel, T., Ziebold, R., Crell, C., Thiele, J.

SPIE - The International Society of Optical Engineering

K. Kamon, W. Wakamiya, H. Nagata, K. Moriizumi, T. Miyamoto

Society of Photo-optical Instrumentation Engineers

Kobayashi,S., Uno,T., Yamamoto,K., Tanaka,S., Kotani,T., Inoue,S., Higurashi,H., Watanabe,S., Yano,M., Ohki,S., …

SPIE - The International Society for Optical Engineering

Kamon,K.

SPIE-The International Society for Optical Engineering

Nakao,S., Narimatsu,K., Miyagi,T., Ogawa,S., Tamada,N., Nakae,A., Tokui,A., Tsujita,K., Arimoto,I., Wakamiya,W.

SPIE-The International Society for Optical Engineering

Suganaga T, Maejima S, Hanawa T, Ishibashi T, Nakao S, Shirai S, Narimatsu K, Suko K, Shiraishi K, Ishii Y, Ando, T, …

SPIE - The International Society of Optical Engineering

Dolainsky,C., Maurer,W., Waas,T.

SPIE-The International Society for Optical Engineering

Hashimoto,K., Usui,S., Hasebe,S., Murota,M., Nakayama,T., Matsuoka,F., Inoue,S., Kobayashi,S., Yamamoto,K.

SPIE-The International Society for Optical Engineering

S. Shioiri, H. Tanabe

Society of Photo-optical Instrumentation Engineers

Hong,J.-S., Kim,H.-B., Yune,H.-S., Ahn,C.-N., Koo,Y.-M., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Nakao,S., Nakae,A., Tsujita,K., Matsui,Y.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12