Blank Cover Image

Optical proximity effects and correction strategies for chemical-amplified DUV resists

Author(s):
Beeck,M.Op de ( IMEC )
Bruggeman,B.
Botermans,H.
Driessche,V.Van
Yen,A.
Tritchkov,A.
Jonckheere,R.
Ronse,K.
hove,L.Van den
4 more
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. date:
1996
Vol.:
Part2
Page(from):
622
Page(to):
633
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

Similar Items:

Goethals,A.M., Vertommen,J., Roey,F.Van, Yen,A., Tritchkov,A., Ronse,K., Jonckheere,R., hove,L.Van den

SPIE-The International Society for Optical Engineering

R. Pforr, A.K. Wang, K. Ronse, L. Van den Hove, A. Yen

Society of Photo-optical Instrumentation Engineers

Tritchkov,A., Rieger,M.L., Stirniman,J.P., Yen,A., Ronse,K., Vandenberghe,G., hove,L.Van den

SPIE-The International Society for Optical Engineering

Ronse,K., Tritchkov,A., Randall,J., Jonckheere,R., Ghandehari,K., Van den hove,L.

SPIE-The International Society for Optical Engineering

Beeck,M.Op de, Ronse,K., Ghandehari,K., Jaenen,P., Botermans,H., Finders,J., Lilygren,J.A., Baker,D.C., Vandenberghe,G., …

SPIE-The International Society for Optical Engineering

van den Hove, L., Ronse, K.

Electrochemical Society

Randall,J., Tritchkov,A., Jonckheere,R., Jaenen,P., Ronse,K.

SPIE-The International Society for Optical Engineering

Zandbergen,P., Ansem,W.Gehoel-van, Vandenberghe,G., Driessche,V.Van, Vloeberghs,H.

SPIE-The International Society for Optical Engineering

Ronse,K., Beeck,M.Opde, Yen,A., Kim,K.-H., hove,L.Van den

SPIE-The International Society for Optical Engineering

Yamana,M., Itani,T., Yoshino,H., Hashimoto,S., Samoto,N., Kasama,K.

SPIE-The International Society for Optical Engineering

Lin,C.-H., Chen,C.-C., Jenq,J.-S., Beeck,M.Op de, hove,L.Van den

SPIE-The International Society for Optical Engineering

Rosenbusch,A., Juffermans,A.H., Kirsch,H., Lalanne,F.P., Maurer,W., Romeo,C., Ronse,K., Schiavone,P., Simecek,M., …

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12