Blank Cover Image

Characterization and optimization of CD control for 0.25-ヲフm CMOS applications

Author(s):
Publication title:
Optical Microlithography IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
Pub. Year:
1996
Vol.:
Part2
Page(from):
555
Page(to):
563
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421029 [0819421022]
Language:
English
Call no.:
P63600/2726
Type:
Conference Proceedings

Similar Items:

Beeck,M.Op de, Ronse,K., Ghandehari,K., Jaenen,P., Botermans,H., Finders,J., Lilygren,J.A., Baker,D.C., Vandenberghe,G., …

SPIE-The International Society for Optical Engineering

Op,de,Beeck,M., Vandenberghe,G., Jaenen,P., Zhang,F.-H., Delvaux,C., Richardson,P., van,Puyenbroeck,I., Ronse,K., …

SPIE-The International Society for Optical Engineering

Tritchkov,A., Rieger,M.L., Stirniman,J.P., Yen,A., Ronse,K., Vandenberghe,G., hove,L.Van den

SPIE-The International Society for Optical Engineering

van den Hove, L., Ronse, K.

Electrochemical Society

Ronse,K., Maenhoudt,M., Marschner,T., Van,den,hove,L., Streefkerk,B., Finders,J., van,Schoot,J., Luehrmann,P.F., …

SPIE-The International Society for Optical Engineering

Wang, Q. F., Lauwers, A., Jonckx, F., Potter, M. de, Chen, Chun-Cho, Maex, K.

MRS - Materials Research Society

Goethals,A.M., Vertommen,J., Roey,F.Van, Yen,A., Tritchkov,A., Ronse,K., Jonckheere,R., hove,L.Van den

SPIE-The International Society for Optical Engineering

Beeck,M.Op de, Bruggeman,B., Botermans,H., Driessche,V.Van, Yen,A., Tritchkov,A., Jonckheere,R., Ronse,K., hove,L.Van …

SPIE-The International Society for Optical Engineering

Kizilyalli,I.C., Huang,R.Y., Hwang,D., Kane,B.C., Ashton,R., Kuehne,S., Deng,X., Twiford,M.S., Martin,E.P., …

SPIE-The International Society for Optical Engineering

Sadana, D. K., Hovel, H. J., Freeouf, J. L., Chu, S. F.

MRS - Materials Research Society

Gerung,H., Chhagan,V.K., Yelehanka,P.R., Zhou,M.S., Hui,J.K.L.

SPIE - The International Society for Optical Engineering

Sturtevant,J.L., Weilemann,M.R., Green,K.G., Dwyer,J., Robertson,E., Hershey,R.R.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12