Swing curve characteristics of halftone PSM with off-axis illumination for i-line lithography

Swing curve characteristics of halftone PSM with off-axis illumination for i-line lithography

Author(s):

Choi,Y.-S. ( Samsung Electronics Co.,Ltd. )
Kang,H.-Y.
Han,W.-S.
Koh,Y.-B.

Publication title:

Optical Microlithography IX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2726

Pub. Year:

1996

Vol.:

Part2

Page(from):

508

Page(to):

515

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421029 [0819421022]

Language:

English

Call no.:

P63600/2726

Type:

Conference Proceedings

Details

TDL ID:	ZA00020263
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	1996 : 9th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1996.03.13-1996.03.15

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