Swing curve characteristics of halftone PSM with off-axis illumination for i-line lithography
- Author(s):
- Choi,Y.-S. ( Samsung Electronics Co.,Ltd. )
- Kang,H.-Y.
- Han,W.-S.
- Koh,Y.-B.
- Publication title:
- Optical Microlithography IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2726
- Pub. Year:
- 1996
- Vol.:
- Part2
- Page(from):
- 508
- Page(to):
- 515
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421029 [0819421022]
- Language:
- English
- Call no.:
- P63600/2726
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Fabrication of dense contact patterns using halftone phase-shifting mask with off-axis illumination
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Simulation of resolution enhancement in contact lithography by off-axis illumination
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Design of pattern-specific mask grating for giving the effect of an off-axis illumination
Society of Photo-optical Instrumentation Engineers |
4
Conference Proceedings
Customized off-axis illumination aperture filtering for sub-0.18-ヲフm KrF Lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
ArF halftone PSM cleaning process optimization for next-generation lithography
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
Evaluation of the attenuated PSM performance as the shifter transmittance and illumination systems
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Control and uniformity of 280-nm features in i-line lithography using optical proximity corrections and off-axis illumination
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |